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Nguyễn Hoàng Tài
Tel: 0915 031 817 or 01686 530 609
Email: sale10@tmpvietnam.com
hoangtai.tmpvietnam@gmail.com
Features
- Long-term zero stability of
- Ultra-fast settling times: 300 ms -
- Full-scale flow rates up to 300 slpm
- Ultra-high purity flow path - 4µ inch Ra surface finish
- SEMI F20 compliant wetted materials
- Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
- Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
- MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
- Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
- Optional High Accuracy configuration
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
- By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
- Optimized wetted flow path for improved dry-down
- With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
- A full gas database delivers the widest process gas coverage
- Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
- GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
GF125
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GF125HA
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GF126
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Differentiator |
Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity
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High Accuracy
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High Flow Rate
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Flow Range (Full Scale Capacity) |
3 sccm - 55 slm |
5 sccm - 10 slm N2 Eq.
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55 slm - 300 slm
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Surface Finish |
4µ inch Ra |
4µ inch Ra |
4µ inch Ra |
Accuracy |
±1% S.P. > 35-100%
±0.35% F.S. 2-35%
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±1% S.P. 10-100% F.S.
±1% S.P. plus ±0.04% F.S. 1-10% F.S.
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±1% S.P. > 35-100%
±0.35% F.S. 2-35%
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Repeatability |
< ±0.15% S.P. |
< ±0.15% S.P. |
< ±0.15% S.P. |
Response Time |
Normally Closed Valve
300ms (3-860 sccm N2 Eq.)
400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
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Normally Closed Valve
300ms (
400ms (861-7200 sccm N2 Eq.)
500ms (7201-10000 sccm N2 Eq.)
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Normally Closed Valve
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Response Time |
Normally Open Valve
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Normally Open Valve
—
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Normally Open Valve
—
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Multi-Gas & Range Configurability |
MultiFlo™ Standard |
— |
MultiFlo™ Standard |
Pressure Transient Insensitivity |
±5% S.P. up to 5 psi/sec upstream press. spike
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± 5% S.P. for up to 5 psi/sec upstream press. spike |
Ability to measure inlet pressure
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Diagnostic Capability |
Status Lights - MFC Health, Network Status
Alarms - Control Valve Output, Network Interruption
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Status Lights: MFC Health & Network Status
Alarms: Control Valve Output & Network Interruption
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Status Lights: MFC Health & Network Status
Alarms: Control Valve Output & Network Interruption
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Analog Communication |
0-5 Vdc
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0-5 Vdc
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0-5 Vdc
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Digital Communication |
RS485 L Protocol
DeviceNet™
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RS485 L Protocol
DeviceNet™
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RS485 L Protocol
DeviceNet™
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Differentiator
Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity
Flow Range (Full Scale Capacity)
Accuracy
±1% S.P. > 35-100%
±0.35% F. S. 2-35%
Repeatability
< ±0.15% S.P.
Linearity
±0.5% F.S. (included in accuracy)
Response Time
Normally Open Valve:
(specific models only)
Multi-Gas & Range Configurability
MultiFlo™ Standard (most models)
Pressure Transient Insensitivity
Number of Bins
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
Zero Stability
< ±0.5% F.S. per year
Flow Temperature Coefficient
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Level of Purity / Surface Finish
4 - 5µ inch Ra
Wetted Materials
SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Valve Options
Normally Closed
Normally Open (specific models)
Meter (no valve)
Differential Pressure Range
3-860 sccm = 7-45 psid
861 - 7200 sccm = 10 - 45 psid
7201 - 55000 sccm = 15 - 45 psid
51 - 300 slm = 30 - 90 psid
*Typical pressure drops. Contacts Brooks Technical Support for more information.
Max Pressure
Standard GF Series: 100 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity
1x10-10 atm cc/sec He
Status Lights
MFC Health
Network Status
Alarms
Control Valve Output
Network Interruption
Diagnostic / Service Port
RS485 via 2.5mm jack (all models)
Display
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
Digital Communication
DeviceNet™
RS485 L-Protocol
Electrical Connection
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Power Supply / Consumption
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
EMC
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
100% France Origin
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Brooks Instrument Vietnam
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810 Magnetic Level Gauge
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810R-1”-C14-M1/2-S1x3-Z24/l-1500
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100% France Origin
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Brooks Instrument Vietnam
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Documents (Optional)
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D0-3.1 Material Certificate
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100% France Origin
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Brooks Instrument Vietnam
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D12-GA drawing
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100% France Origin
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Brooks Instrument Vietnam
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D13-Conformity/Pressure Test/2.2 Material Cert
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100% France Origin
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Brooks Instrument Vietnam
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Cert of origin by chamber of commerce
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100% Singapore Origin
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Brooks instruments Vietnam
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BM Series Oval Gear Meter
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BM50AASF4R1CKAA
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Estimated weight = 15-24 kg package included
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Meter Size BM50A 2 inch
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Body Material A Aluminium
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Rotor/Gear Material S 316 SS Rotor Gear
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Display F Standard LCD Display in Aluminium Housing
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Connection Type 4 ANSI 150lbs RF Flange
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Output / Electronic R Reed Switct
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Viscosity 1 Standard < 1000 cP
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Temperature Class C Standard 316 SS Rotors, 120 degC
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Seals K Teflon
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Options A None
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Documentaiton A None
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100% USA Origin
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Brooks Vietnam
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Brooks Sho-Rate 1355E Series
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Code: 1355EXXXCFX1A
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(Sho-RateTM "150" Model 1355E
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Code: 1355EB2BCFQ1A)
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100% USA Origin
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Brooks instrument Vietnam
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SLA5850 Thermal Mass Flow Controller
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SLA5850SB1AB1B2A1
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100% USA Origin
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Brooks instrument Vietnam
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9660 High Temperature Mass Flow Meter
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9660CXF-0004 500C-4RHOVAMMUXXXXCX10EXX
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100% USA Origin
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Brooks instrument Vietnam
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SLA5850 Thermal Mass Flow Controller
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SLA5850SB1AB1B2A1
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100% USA Origin
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Brooks instrument Vietnam
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9660 High Temperature Mass Flow Meter
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9660CXF-0004 010C-4RHOVAMMUXXXXCX10EXX
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100% USA Origin
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Brooks instrument Vietnam
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SLA5850 Thermal Mass Flow Controller
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SLA5850SB1EE1B2A1
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Digital I/O. Communications S Smart Emulation (Analog and/or RS485)
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Mechanical Connections B1 1/4” Tube Compression Fittings W/Filter
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O-ring Material E EPDM for sensor o-ring, Teflon for the rest
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Valve Seat Material E EPDM
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Valve Type 1 Normally Closed
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Analog I/O B 0-5 Vdc
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Power Supply 2 +24 Vdc
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Output Enhancement A Standard Setting / Response Time
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8-14kg package included
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Note: We cannot quote with 220VAC power supply.
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BUT We can only do +/-15 V or +24 V type.
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100% USA Origin
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Brooks instrument Vietnam
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Model Code: 2510A2A17SVVT
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Revision A Rev A
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Tube Code 2A17 4-50 LPM air
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Fittings S Stainless Steel
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Valve V Standard Inlet Valve
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Seals VT Viton
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Brand: AT2E – Mark-10 – Matsui – Taiyo – Bircher – Wise Control – Brooks Instrument – Nireco –– Redlion – Anritsu – Elettrotek Kable - Novotechnik - AS Scholer + Bolte GmbH – Presto – FSG – Koehler Instrument – Mehrer – Minimax –Pefufer – Redlion – Presto– Koehler – United Electric (UE) – Bihl + Wiedemann – Masibus – Pora - Leine linde - Endress Hauser – Sick - Puls Power..